Contact Resistance Measurement System

The TLM manual probing system, TLM-F4, is composed of a 4” manual prober with a probe card, a Microscope, a Switching Matrix and a Precision Meter (or optional SourceMeter) and software.

Way of one touchdown sample contact with time-saving and reliability to realize all the resistance measurement by 4-wire mode and TLM accordingly. 

[Features]

• 4-wire mode to eliminate intrinsic cable and contact resistance 

• Specific contact resistance

• Sheet resistance

• Transfer length

• Line resistance

• BB to BB resistance (Optional)​

[System]

• Multiple-points resistance measurement

• Application of TLM technique (Transfer-Length Method)

• Standard to 6 fingers

• Customized made probe head with line to line spacing at μm order Measurement data is provided in Excel

• System with coarse pitch available (option)