The 4 Point Probing System is composed of a table top manual 4 point prober with a 4 point

probe head , a precision meter (or optionally an I-V-R Measurement system or an all-in-one SourceMeter) and a software can base on user’s sample geometry and thickness to measure out Resistance [Ω], Sheet Resistance [Ω/□], Volume Resistivity [Ω-cm], and Conductivity [S/cm]. The measurement conditions are selectable, so as for accurate signal extraction. The measured data is on-line displayed and stored as .csv format.

[Feature]

● On-line fine adjustment for probe Z height

● Hand grip driven for fast moving probe Up and Down

● Same probe Z height control for each probe Up and Down

● Full coaxial paths from stage to cable end for system’s high noise immunity

● Based on sample geometry and temperature for sheet resistance and resistivity measurement

● Various 4 point measurement applications can be realized

● When it is equipped with Tungsten 4 point probe, it can realize the high low resistivity measurement of pure si wafer (eg. 0.003Ω-cm ~ 2Ω-cm or else resistivity).