Z Pneumatic Four Point Prober /
Z-height Pneumatic Four Point Probing Measurement System /
Auto Z-Axis Pneumatic Probing Four Point Probing Measurement System
The 4 Point Probing System is composed of a table top Z-height air control 4 point prober with a 4 Point probe head for manual probing, the software can base on user’s sample geometry and thickness to measure out Resistance [Ω], Sheet Resistance [Ω/□], Volume Resistivity [Ω-cm], and Conductivity [S/cm]. The measurement conditions are selectable, so as for accurate signal extraction. The measured data is on-line displayed and stored as .csv format.
[Feature]
● On-line fine adjustment for probe Z height
● Hand grip control Air for fast moving probe head Up and Down
● Mechanism control same probe Z height for each probe Up and Down
● Full coaxial paths from stage to cable end for high noise immunity
● Based on sample geometry for sheet resistance and resistivity measurement
● Various 4 point measurement applications can be realized
● Hot chuck for measurement at high temperature (option)
● Multiple points measurement (option)
[Specification]
● 4 point probe main stage
● 4 point probe head: BeCu with Au coated
4 point probe head: Tungsten (option)
● 4 point prober Spacing: 1.6mm ; Dia.: 100um; Pressure: 100 grams
● On-line fine adjustment, more than 1cm, by screw for probe Z-height
● 6" current isolation substrate
● Hand grip control air for probe Z fast up and down
● Digital Meter Measurement range: 0.1mΩ (min) or 1μΩ (min)
● DCV 0.035% accuracy
● On-line fine adjustment for probe Z height
● 2-wire/4-wire resistance measurement
● Interface for RS232, USB and digital I/O
● SourceMeter (option)
● Various measurement condition selections for accurate signal extraction
● Conversion of measured resistance to sheet resistance, resistivity, and conductivity based on sample geometry
● Data is on-line display, and storable
