Highly Efficient and Cost-Effective Prober

• Vacuum Chuck 4”, 6”, or 8” with chuck theta rotatable
• Micropositioner and microscope share same stage are moving together to any position on the wafer for probing
• Intuitiveness and time saving for probing 
• Easy/Fast to load/unload wafer
• Platen for placement of micropositioner
• Platen X-Y stage quick travel range X-Y 4”~8". 4”~8” is moveable to any position
• On the wafer for probing; Hand screw to fix after quick move for fine adjustment with range of +/-20mm and <10μm in resolution; Z UP/Down >10mm with fine adjustable <10μm 
• Microscope linked together with platen stage is the same spec. as those of Platen X-Y stage and additional discrete Y fine +/-15mm for offset adjustment; Z is adjusted by Z focus knob on the microscope
• All the X-Y-Z movement is performed on the linear rails
• Applicable to dock with high magnification stereo microscope or Metallurgic microscope